TiN and Ti-O/TiN films have been deposited on Ti-6Al-4V substrate using plasma immersion ion implantation and deposition (PIII&D). It has been proved that TiN and Ti-O/TiN films both enhance the corrosion resistance of substrate materials. Potentiodynamic polarization curves show that both Ti-6Al-4V substrates deposited with these two kinds of films have lower dissolution urrents than that of the uncoated one. Electrochemical impedance spectroscopy (EIS) measurements indicates that TiN films with high corrosion resistance is mainly due to its barrier-type dense film layer, and that Ti-O/TiN film provides high corrosion resistance is mainly owing to its high corrosion potential (Ecorr). Friction coefficient curves obtained from pin-on-disk wear tests, as well as following SEM observation of wear residual trace width and morphology, indicate that TiN and Ti-O/TiN films both present high wear resistance in comparison with uncoated Ti-6Al-4V.