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引用
期刊论文
A Miniature Large Displacement Linear Nanopositioning Piezoelectric Actuator①
HIGH TECHNOLOGY LETTERS Vol. 10 No.1 Mar. 2004,-0001,():
A miniature linear piezoelectric actuator which moves based on inertia-friction theory is described in this paper. The authors discuss its driving principle, dynamic model and experimental results. The piezo-electric actuator includes two piezoelectric elements. Through the sequentially deformations of the tow piezo elements, the moving mass slides a miniature displacement. Many strokes will be added to be a large displacement. This type of piezoactuator has advantages in its dimension and motion type, so it can be miniaturized to do micro-manipulation or micropositioning in microspace.
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