成果题名:Partly three-dimensional global modeling of a silicon Czochralski furnace. I. Principles, formulation and implementation of the model
作者: Lijun Liu, Koichi Kakimoto *
成果题名:Partly three-dimensional global modeling of a silicon Czochralski furnace. I. Principles, formulation and implementation of the model
作者: Lijun Liu, Koichi Kakimoto *
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