成果题名:The effect of N+-implanted aluminum substrate on the mechanical properties of TiN films
作者: Youming Liu a, Liuhe Li a,b,* Ming Xu a, Qiulong Chen a, Yawei Hu a, Xun Cai a, Paul K. Chu c
成果题名:The effect of N+-implanted aluminum substrate on the mechanical properties of TiN films
作者: Youming Liu a, Liuhe Li a,b,* Ming Xu a, Qiulong Chen a, Yawei Hu a, Xun Cai a, Paul K. Chu c
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