成果题名:Uniformity and stoichiometry of large-area multicomponent oxide thin films deposited by sputtering
作者: B.W. Tao a,b,*, J.J. Chen a, X.Z. Liu a, Y.R. Li a, R. Fromknecht b, J. Geerk b
成果题名:Uniformity and stoichiometry of large-area multicomponent oxide thin films deposited by sputtering
作者: B.W. Tao a,b,*, J.J. Chen a, X.Z. Liu a, Y.R. Li a, R. Fromknecht b, J. Geerk b
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