Parallel valveless micropump with two flexible diaphragms
首发时间:2005-01-05
Abstract:his paper presents a parallel dynamic passive valveless micropump, which consists of three layers—valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, this paper designed a micropump. And the relative length (L/d) of the micropump’s nozzle is 4.An 7×7 array of permanent magnetic posts is embedded in the PDMS film. The two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS○R and Matlab○R are adopted to analyze the actuation effect of the coil and the flow characteristic of the mi
keywords: micropump, valveless pump, permanent magnet, PDMS
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电磁驱动无阀并联微泵
摘要:本文提出了一种并联式动态无阀并联微泵,该微泵由阀体、振动膜和电磁线圈三层结构组成。其中,阀体是由休硅湿法刻蚀制得,阀体上刻蚀有两个泵室,每一个泵室由一个振动膜驱动;将硅橡胶(PDMS)甩于电镀有永磁体阵列的硅片上,再从背面刻蚀硅制得振动膜;线圈通过电镀方法制作于硅片上。给线圈通以电流,在线圈磁场的驱动作用下,该柔性振动膜可以上下振动。本文在分析了柔性振动膜的电磁驱动性能和机械特性以及喷嘴的流向依赖特性之后,设计了一个微泵并探讨了其制作工艺。本文所设计的微泵喷嘴的相对长度(L/d)为4,内嵌于PDMS振动膜的永磁体阵列为7×7。采用两个振动膜以异步方式工作,这可以减小液压冲击,增大微泵的流量。采用ANSYS○R和Matlab○R对线圈的驱动性能和微泵的流量特性进行了分析。结果表明,当采用0.3A,100Hz电流驱动时,振动膜的振幅为30μm,微泵的流量为360μL/min.
关键词: 微泵 无阀泵 永磁体 PDMS(聚二甲基硅氧烷)
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No.1420565811048865****
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