纳焦飞秒激光刻划微光器件的应用研究
首发时间:2005-02-06
摘要:使用振荡器产生的飞秒激光与透明有机材料相互作用,在其表面和内部进行了刻画微光器件的应用研究。理论分析得到飞秒激光参数、平台移动速度对线宽的影响,实现了数据的三维存储和一维光波导的试验,在透明有机材料PMMA表面进行了多种光栅的刻划,并进行了衍射和色散测试。
关键词: 飞秒激光微加工 相干信号探测 微结构光栅 多脉冲烧蚀阈值
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The Application of Machining Micro-optoinstrument on Organic Material with Nanojoule Femtosecond laser
Abstract:The femtosecond laser was directly delivered through the oscillator to interact with organic material. It was studied that the micro-optoinstrument was ablated on the surface and inner the material. The relationship between the characters of femtosecond laser, the speed of 3-D stage and the width of line was obtained by calculation. The 3-D storage and 1-D waveguide were realized inner the PMMA. And some kinds of microstructure gratings on the surface of PMMA were scored in this paper. Different diffraction patterns were presented as a result of different size and array of gratings.
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No.1544189121107652****
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