多晶薄膜生长计算机模拟研究
首发时间:2005-03-09
摘要:薄膜技术在现代科技领域中有着广泛的应用,人们对薄膜的生长过程通过理论和实验进行了深入的研究,其中计算机模拟是重要的方法,根据蒙特卡罗法和分子动力学原理,本文提出了一种基于原子尺寸的多晶薄膜生长模型,本模型可以定量的分析薄膜表面粗糙度、平均晶粒尺寸与薄膜生长方向等微观结构特征,最后,本文利用模型分析了薄膜沉积参数对薄膜微观结构的影响,结果表明,本模型是合理的。 关键词: 薄膜生长;模型;计算机模拟
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Computer simulation study of polycrystalline thin film growth
Abstract:Thin film technologies are widely used in modern scientific and technological fields, Thin film growth has been studied deeply and computer simulation is a useful method in the studies. In this paper, an atomic level polycrystalline thin film growth model based on the theory of Monte Carlo and molecule kinetics is developed. The model can analyze the roughness of thin film, average grain size, and orientation distribution and so on. in the end, the influence of thin film deposition parameters on the microstructure of thin film is analyzed by the model, and the result indicts the model is reasonable.
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No.1671435311103300****
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