基于电容模型的脉冲电解、电化学光整、蚀刻加工机理分析
首发时间:2005-12-02
摘要:本文用一个动态变化的电容模型来描述电化学加工过程,从一个全新的角度¾电容,来解释电化学加工的机理。利用电极体系的等效阻抗的变化来解释脉冲电解中线性电解液非线性化的现象;通过界面双电层电容值的变化来解释脉冲电化学光整加工提高精度的根本原因;在脉冲电化学蚀刻中由于保护膜产生的类似电解电容效应,使该处的电容值显著变化,从而解决了在纯化学蚀刻中出现的侧向腐蚀问题。
关键词: 电解加工 电化学光整 电化学蚀刻 机理 双电层电容
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The mechanism research of the pulsed electrochemical machining(PECM), polishing(EP) and micromachining(EMM) based on the capacity model
Abstract:A dynamic changed model based on the capacity is used to discribe the processs of ECM and explain its mechanism from a new point of view-- capacity in this article.The change of equivalent impadence of the electrode system is used to explain that the linearity electrolyte change to nonlinearity in PECM. The reason of the improvement of precision in the EP is the change of double layer capacity.The protection film in EMM lead to the creation of electrochemical capacity ,then lead to the change of interface capacity,and this is why the EMM hasn’t the problem of the echting under the protection film compared with pure chemical machining.
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