化学修饰溶胶-凝胶法制备薄膜微细图形研究
首发时间:2006-01-09
摘要: 本文介绍了一种薄膜微细图形制备方法-化学修饰溶胶-凝胶法,该方法设备简单,成本低廉,微细图形制备精度高。解释了它的薄膜微细图形制备原理。对它的影响因素以及在光波导薄膜,铁电薄膜以及透明导电氧化物薄膜的微细图形制备领域研究应用情况进行了综合评述,提出了研究发展前景。
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Studies on Preparation of Patterned Films by Chemically Modified Sol-gel Method
Abstract:This paper presents a new method, called chemically modified sol-gel method, for preparation of patterned films. The process is inexpensive and easy to control, and produces patterned films of good quality. The preparation mechanism and influencing factors are discussed. Applications in fine patterning of waveguide films, ferroelectrical films and transparent conducting oxide films and development trends are pointed out.
Keywords: chemical modification sol-gel method thin films fine patterning
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No.4916406861136790****
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