表面应力对微悬臂梁传感器本征频率的影响
首发时间:2007-12-26
摘要:在对微悬臂梁传感器本征频率的分析中,一般都忽略了表面应力的影响,由此计算出的吸附质量可能是不精确的。为此,本文从表面应力和单位表面自由能的关系出发,把表面自由能算入微悬臂梁运动的总能量中,根据哈密顿原理推导出微悬臂梁运动的控制微分方程,得到了任意阶本征频率的解析解。分析表明:表面应力对微悬臂梁传感器本征频率的影响是由表面弹性常数决定的,当表面应力与表面应变无关时,这种影响可以不考虑,但在一般情况下这种影响是不可忽略的。
For information in English, please click here
The effects of surface stress on the resonance frequency of a micro-cantilever sensor
Abstract:In the analysis of the resonance frequency of a micro-cantilever, the effects of surface stress are commonly neglected which may be likely to cause imprecise in the calculation of adsorption mass. In this paper, a theoretical analysis model of the movement of a micro-cantilever is established based on the relationship between surface stress and unit surface free energy. By using Hamilton’s principle the control differential equation and resonance frequency of the micro-cantilever are obtained. The analysis indicates that the effects of surface stress on the resonance frequency of a micro-cantilever sensor are determined by the surface elasticity constant. Only if the surface stress is independence of the surface strain the effects could be neglected, but in the most time these effects are existed and should be taken into consider.
Keywords: surface stress, surface free energy, micro-cantilever, resonance frequency
论文图表:
引用
No.1740715585911986****
同行评议
共计0人参与
勘误表
表面应力对微悬臂梁传感器本征频率的影响
评论
全部评论0/1000