AZO薄膜的溶胶-凝胶制备与氮气热处理
首发时间:2008-06-03
摘要:本文通过Sol-Gel法制备了透明导电AZO薄膜,在氮气气氛下对薄膜进行了300℃1个小时的热处理。XPS、XRD、SEM、UV-Vis和四探针仪表征了薄膜的结构与性能。结果表明,适当增加掺杂量能提高薄膜的电导率,过多的掺杂反而会降低电导率。掺杂量对薄膜在可见光范围内透射率影响不大,可见光透射率均大于80%。低温氮气热处理可以显著提高薄膜电导率,方阻最低可达270Ω/□。
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Preparation of AZO film by sol-gel method and heat-treatment in N2 atmosphere
Abstract:AZO transparent conductive films were prepared by sol-gel method and heat treated at 300刟C for 1h in N2 atmosphere. Structure and properties of the films were characterized by XPS, XRD, SEM, UV-Vis and four-probe method. The results showed that conductivity of the films increased with increase of doing amount blew an optimum value; excessive dope deteriorated the conductivity. Transparent of the film was above 80% in visible region, which was not effected by doping amount.Conductivity of the film was improved by low temperature heat-treatment in N2 atmosphere, and the lowest sheet resistance was 270
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No.2195625472412124****
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