Algorismic study on squeeze film damping of micro-mechanical resonator device based on wavelet-galerkin method

• 1、Department of Vehicle Engineering, Southeast University

Abstract：Correcttly predict squeeze film damping device for MEMS design is of utmost importance. In this paper, a preliminary calculation was conducted to solve the squeeze film damping of mico-mechanical resonator device by means of Wavelet-Galerkin method. A squeeze film damping model of the mico-resonator device was set up in the first step,and it’s differential equations with boundary conditions were given. Then some necessary simplification was applied. Daubechies wavelet was used to expand the fluid pressure response of this system under known input. Finally,the correlation coefficient and approximate solution were obtained based on Galerkin merhod. Considering that there is no analytical expression to the Daubechies wavelet and it’s ill condition problem,this paper also discussed the correlation coefficient,which is the derivation and integral of the wavelet involved in Galerkin method. Based on the proposed method, model with given parameters was calculated and the results were compared with traditional methods. It can be found that the proposed method is effective in the analysis of squeeze film damping and the calculation precess is easy but fast.

Keywords： Squeeze film damping Wavelet-Galerkin Correlation coefficient Daubechies wavelet