飞秒激光在硅中诱导三维微通道
首发时间:2009-07-14
摘要:本文介绍了利用飞秒激光脉冲在硅中诱导微通道。利用位于硅吸收波段的800 nm波长的飞秒激光在硅样品中诱导出多层微通道。采用激光横向和纵向扫描的方法,可以在不破坏硅样品表面的情况下,在其内部构造出三维微通道。微通道直径大小可以通过改变激光功率,扫描速度和激光聚焦深度来控制。
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Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser
Abstract:We report on photoinduced microchannels inside silicon by femtosecond laser pulses. Multilayer microchannels were fabricated inside silicon samples by an 800 nm femtosecond laser, wavelength of which was in the absorption region of silicon. By combining transverse scanning and longitudinal scanning, we can fabricate any pre-designed three-dimensional microchannels in the interior of silicon without surface damage. The diameter of the photoinduced microchannels can be controlled by varying laser power, scan velocity or focal position.
Keywords: femtosecond laser microchannel Silicon
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