液相外延生长GaAs微探尖的质量改进
首发时间:2010-04-29
摘要:本文对比了两种在选择性液相外延生长GaAs微探尖结束后使生长液与衬底脱离的方法:平推法和旋转石墨舟法。利用扫描电子显微镜对两种方法得到的GaAs微探尖表面形貌进行了表征。结果表明,与平推法相比,通过旋转石墨舟法制得的GaAs微探尖表面残留的生长液体积大大减小,从而大大改善了GaAs微探尖的质量。
关键词: GaAs微探尖 扫描近场光学显微镜 生长液 液相外延
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Improvement of GaAs Microtips Grown by Selective Liquid-phase Epitaxy
Abstract:We contrast two methods of separating the growth solution from GaAs substrate after selective liquid-phase epitaxy growth of GaAs microtips: horizontal sliding graphite boat and rotating graphite boat. Scanning electron microscope is employed to observe the surface morphologies of the GaAs microtips. The results show that by rotating the graphite boat, the size of the residual melt is remarkably reduced, which is of great significance to the preparation of high-quality GaAs microtips.
Keywords: GaAs microtips Scanning electron microscope Growth solution liquid-phase epitaxy
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