磁控溅射掺铝氧化锌薄膜的Ar气工艺条件研究
首发时间:2011-11-15
摘要:磁控溅射掺铝氧化锌(AZO)透明导电膜是大面积太阳能薄膜电池工业化生产的重要工艺手段。实验发现,在不同的Ar气进气方式的溅射过程中, AZO薄膜都呈现了中间厚度高于两侧厚度的不均匀现象,而且Ar气进气管的遮挡情况对厚度的峰值位置分布也有一定影响。这是由于Ar气气流在靶表面的压强分布不均所导致的。本文通过实验和模拟的手段分析了这种现象的机理,对提高溅射镀膜的均匀性起到理论指导作用。
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Ar Air Technology Condition Research of AZO Thin Film by Magnetron Sputtering Technology
Abstract:Magnetron sputtering Al-doped Zinc Oxide (AZO) thin film is the main method of large area thin film solar cell fabrication in industry. In different sputtering conditions of Ar air flow mode, the thickness of AZO thin films showed the obviously nonuniform phenomenon that the thickness of thin film was larger in the middle than the side, the occlusion of Ar inlet could make some influence on the position of thickness peak value. The reason was that the nonuniform pressure distribution on the top of target could make the influence on the thickness of AZO thin films. This paper analyzed this phenomenon by the means of experiment and simulation, that would establish the theoretical foundation for the uniform thin films fabrication in large area sputtering technology.
Keywords: Magnetron Sputtering Fluid Model Zinc Oxide
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