Fabrication of YBCO microarray by sol-gel process using photosensitive metal chelates

• 1、School of Material Science and Engineering, Xi\'an University of Technology, Xi\'an 710048
• 2、School of Material Science and Engineering, Xi'an University of Technology, Xi'an 710048
• 3、Advanced Material Analysis and Test Center, Xi\'an University of Technology, Xi\'an 710048

Abstract：Using yttrum acetate, barium acetate, and copper acetate as the starting materials, benzalacetone (BzAcH) as chemical modifier, methanol (MeOH) as solvent can synthesize a stable fluorine-free YBCO precursor solution. The coated YBCO gel film using this precursor solution exhibits photosensitivity to UV irradiation at a wavelength of 330 nm. After the subsequent exposing, the YBCO gel ?lm shows a decreased solubility in several organic solvents. Based on the photosensitivity of the YBCO/BzAcH gel film, YBCO microarray is fabricated by irradiating the gel film with UV light through a mask, followed by leaching the unirradiated area in a mixture solvent of methanol and n-butyl alcohol with the volume ratio of 1:1. The YBCO superconducting microarray with the period of 5 μm is obtained by this new photosensitive sol-gel process.

Keywords： YBCO photosensitivity sol-gel microarray