Application, Theory and Process of Glancing Angle Deposition
首发时间:2013-01-05
Abstract:Thin film technology has a long history. With the development of nanotechnology, thin film characterized by nanostructure has been a new research hotspot. In recent years, glancing angle deposition (GLAD), as a effective way to build nanosturcture thin film, has gained significant attention due to a manifold of possible applications, such as photonic crystals, humidity or pressure sensors and energy. This review summarizes the typical application, theory and method of GLAD.
keywords: Nanotechnology Glancing angle deposition nanostructure thin film
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