掠角沉积纳米结构薄膜技术研究
首发时间:2013-01-09
摘要:薄膜技术有着悠久的历史。随着纳米技术的发展,具有特殊纳米结构的薄膜表现出多种独特的性质,使其在光学、能源以及新型传感器等领域都有着广泛应用潜力。作为构筑纳米结构薄膜的重要途径,掠角沉积技术以其高效,可控等特点越来越受到研究人员的重视,成为新的研究热点。目前对于掠角沉积技术的研究虽然已经得到了一些经验论证,但基础理论以及工艺过程方仍然面需要得到进一步的揭示与优化。本文对掠角沉积技术的概况以及研究现状进行了综述,并对掠角沉积技术的发展现状以及今后的研究方向进行了总结和分析。
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A Review of Glancing Angle Deposition
Abstract:Thin film technology has a long history. With the development of nanotechnology, thin film characterized by nanostructure has been revealed a variety of unique properties, leading to wide application potential in optical, energy, new sensor and other areas. Glancing angle deposition, an most significant way to build nanostructure thin film because of high efficiency and Controllable ability, is attracting researcher's attention and has been a new research hotspot. Although some experience argument has been accomplished, the basic theory need to be further revealed and the process need more optimization. In this paper, the general situation and research status of the Glancing angle deposition technology are reviewed, the development was summarized and the research direction was analysed.
Keywords: Nanotechnolegy Glancing angle deposition nanostructure thin film
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