The trigger mechanism and experiment of a three-dimensional quartz tuning fork probe

• 1、School of Instrument and Opto-electronic Engineering, Hefei University of Technology, HeFei 230009
• 2、School of Instrument and Opto-electronic Engineering, Hefei University of Technology, 230009

Abstract：In order to fulfill true three dimensional (3D) nano-measurement with sub-nano resolution and very low touch force by micro/nano coordinate measuring machine (Micro/nano CMM), a new 3D resonant trigger probe based on quartz tuning fork is proposed. In this probe, a quartz tuning fork together with a microball tip vibrates at its resonant frequency, and it is used as a sensing element of the trigger probe. The resonant vibrating parameters of the quartz tuning fork are highly sensitive to external 3D micro-forces. The distinguished feature of the probe is that it contacts with the sample surface in tapping-mode (TM) in Z direction while works in friction-mode (FM) in X and Y directions. The dynamic contact mechanism of the probe is analyzed according to interface mechanical theory, and mechanical models of the interactions between the microsphere tip and sample surface in X(Y) and Z directions are constructed respectively. According to the established motion equation of mechanical models, several mesoscopic interface forces which influences the probe are analyzed, and the corresponding mathematical simulations are given. By experiment, the probe has sub-nano resolutions in three dimensional directions, and repeatability of about 37 nm in X direction, 70.6 nm in Y direction and 41 nm in Z direction. The theoretical analysis and experimental results certified that this 3D resonant trigger probe can be used as a trigger probe for micro/nano CMM.

keywords： precision measurement technology and instruments three dimensional trigger probe quartz tuning fork interface mechanics resonant vibration micro/nano CMM

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