氧化钒薄膜制备及热处理过程研究
首发时间:2013-12-09
摘要:采用以金属钒为基础原料利用直接反应法制备氧化钒薄膜并进行热处理过程研究,研究热处理温度对氧化钒薄膜成分的影响。采用扫描电子显微镜(SEM)对薄膜形貌进行研究、四探针电阻率测试仪对薄膜电阻进行研究。结果表明400~500℃热处理2 h氧化钒薄膜相变性能最好,相变幅度最大。
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The research of the preparation of Vanadium oxide thin films and heat treatment process
Abstract:Using metal vanadium based raw materials vanadium oxide thin film prepared by direct reaction method and heat treatment process of research, study the effect of heat treatment temperature on composition of vanadium oxide thin films. By scanning electron microscope (SEM) study of film morphology, four probe resistivity tester for thin film resistance were studied. Results show that the 400 ~ 500 ℃ heat treatment 2 h vanadium oxide film phase transition performance is best, phase transformation range is the largest.
Keywords: Physical Chemistry Vanadium oxide Film Heat treatment
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