Performance of a sensitive micromachined accelerometer with an electrostatically suspended proof mass
首发时间:2014-07-01
Abstract:A three-axis micromachined accelerometer where a proof mass is suspended electrostatically in all six degrees of freedom was designed and tested in order to evaluate the performance of this sensitive accelerometer for potential space applications. The micromachined device is based on a glass/silicon/glass bonding structure, fabricated by bulk micro-machining process and operated with closed-loop force-balance technology. The motion of the proof mass with respect to each side is fully servo-controlled by capacitive position sensing and electrostatic force feedback. The design of multi-axis suspension control loops are based on the stiffness requirements for different full-scale ranges. To facilitate ground test of this low-g accelerometer, the measurement range in the vertical axis is set at a relatively high value in order to counteract the gravity in one g condition, while the range in two lateral axes is set as low as possible to achieve high sensitivity. Experimental results of electrostatic suspension, accelerometer performance and cross-axis coupling effect are presented and discussed with the device operated initially in atmospheric environment. Preliminary results of tests on a prototype micro-accelerometer show a sensitivity up to 688.8V/g and noise level of 3 μg/Hz1/2 can be achieved by setting a extremely low full-scale range of ±2.90mg.
keywords: Instrument technology MEMS accelerometer space accelerometer electrostatic suspension suspension stiffness Cross-axis coupling
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一种高灵敏度硅微静电加速度计的实验研究
摘要:设计并测试了一种检验质量采用六自由度静电悬浮的三轴硅微加速度计,以评估这种高灵敏度的加速度计在空间应用的潜力。微机械加工的加速度计器件采用玻璃-硅-玻璃三层键合结构和体硅加工工艺,工作原理基于闭环的力平衡技术。检验质量相对电极的运动采用基于电容式位移检测和静电力反馈的方法实现各个运动自由度的闭环伺服控制。各个支承控制回路设计依据不同轴的加速度测量范围和支承刚度要求。为了便于在地面测试这种低量程的加速度计,加速度计的垂向轴量程较高以克服1g的重力加速度,而水平方向的设计量程尽量低以提高灵敏度。在大气工作条件下,给出并讨论了静电支承回路、加速度计性能和轴间耦合影响的测试结果。加速度计样机的初步测试结果表明,在设定极低的量程±2.90mg时,加速度计的灵敏度为688.8V/g,噪声功率谱密度为3 μg/rt(Hz)。
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No.4602152985493140****
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