银纳米线薄膜作为垂直腔面发射激光器透明导电窗口的研究
首发时间:2015-12-04
摘要:垂直腔面发射激光器 (VCSEL) 中的载流子聚集效应使注入到有源区的工作电流只是通过边缘环形区域很窄的通道,载流子密度分布不均匀,尤其当器件尺寸较大时,激射光斑呈现明显环状以及环中间光强很弱的现象。本文从改善器件注入电流不均匀、提高器件输出光功率出发,设计的一种以银纳米线薄膜作透明导电窗口的垂直腔面发射半导体激光器。对比分析银纳米线薄膜电极与普通环形金属电极对激光器件电流密度分布的影响。分析结果表明,采用银纳米线薄膜作垂直腔面发射激光器的透明导电窗口比传统环形电极结构更加有利于电流浓度的均匀分布,有效避免了激光器环形电极注入引起的载流子的聚集效应,并且使传统结构中几乎不发光的中央区域得到了充分利用,增大了器件有效的发光面积。采用新型结构成功研制出850 nm波段高功率大孔径VCSEL,室温下连续输出最大功率达24.4mW。
关键词: 微电子学与固体电子学 垂直腔面发射激光器 电流扩展 银纳米线薄膜
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Study on the transparent conducting window of the vertical cavity surface emitting laser
Abstract:Vertical cavity surface emitting laser (VCSEL) the carrier aggregation effect make injected into the working current of the active region only through the channel at the edge of the annular region is very narrow, uneven distribution of the carrier density, especially when the device size is large, laser spot presents obvious between rings and ring light intensity is very weak. From this paper is to improve the device into the current uneven, improve device output optical power, the design of a film made with silver nanowires transparent conductive window of vertical cavity surface emitting laser diode. Comparative analysis of silver nanowires film electrode and common circular metal electrode on the distribution of the current density of the laser device. Analysis results show that the silver nanowires of transparent conductive film as vertical cavity surface emitting laser window than traditional annular electrode structure is more beneficial to the uniform distribution of the concentration of the current effectively avoids the laser ring electrode injection caused by the carrier aggregation effect, and almost no glowing in the traditional structure by making full use of the central area, increasing the effective the emitting area. Adopts new structure successfully developed the 850 nm band high-power big aperture VCSEL, continuous maximum power output of 24.4 mW at room temperature.
Keywords: Microelectronics and solid-state electronics Vertical cavity surface emitting laser Current extension Silver nanowires film
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No.4665659111705614****
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银纳米线薄膜作为垂直腔面发射激光器透明导电窗口的研究
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