多层石墨烯在飞秒激光作用下的损伤
首发时间:2016-03-31
摘要:使用飞秒激光对化学气相沉积(CVD)法制备的多层石墨烯进行辐照,得到了多层石墨烯的单脉冲破坏阈值为0.22 mW;利用光学显微镜、原子力显微镜(AFM)和拉曼光谱对加工前、后的试样进行表征,阐述了飞秒激光对多层石墨烯的烧蚀损伤效应,发现飞秒激光在石墨烯微图案化加工方面具有潜在的优势,能够达到亚微米级的加工精度;同时在烧蚀边缘区域,多层石墨烯出现减薄现象。
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Damage on multi-layer graphene by femtosecond laserablation
Abstract:Multi-layer graphene generated by chemical vapor deposition (CVD)was ablated by femtosecond laser, and the obtained single-pulse ablation threshold of multi-layer graphene was0.22 mW. The samples before and after processing were characterized by optical microscopy, atomic force microscope (AFM), and Raman spectroscopy, and the damage effects of femtosecond laser ablation on multi-layer graphene were demonstrated. The results show that femtosecondlaser remains potential advantagesin graphene micro pattern processing with the precision of sub-micro meter; meanwhile, thinning phenomenonfor multi-layer graphene occurs at the edgeof ablation area.
Keywords: special machining process multi-layer graphene femtosecond laser ablation damage
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No.4682018222691458****
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