基于硅纳米结构膜的酒精传感器
首发时间:2016-07-01
摘要:采用化学气相输运方法在蓝宝石衬底上制备了高密度硅纳米结构膜,通过扫描电子显微镜(SEM)对其形貌进行了表征。结果表明这种硅纳米结构膜由交织在一起的硅纳米棒构成,纳米棒长度范围在微米量级,直径约为100nm。利用这种硅纳米结构膜成功地制备了一种酒精传感器,并研究了不同浓度下传感器的传感特性,发现其具有在1s内快速恢复的优点。这种传感器的制作过程简单,成本低廉,在实际应用中具有潜在的价值。
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Ethanol gas sensor based on silicon nanostructure films
Abstract:In this study, silicon nanostructure films were synthesized by chemical vapor transport (CVT), and their morphologies were analyzed by SEM. The experimental results show that the silicon nanostructure films were made up of intertwined silicon nanorods. The length of the nanorods was in the micron range, and the diameter of nanorods was about 100nm. On this basis, we prepared an ethanol gas sensor using silicon nanostructure film, and studied its sensing characteristics to different concentrations of alcohol gas. We found that the sensor’s recovery-time may be less than 1s. What’s more, this kind of sensor is simple in fabrication process, cheap and valuable in practical application.
Keywords: Silicon nanostructure films Ethanol gas sensor Chemical vapor transport Sensitivity
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No.4697132115393014****
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