湿法无胶转移石墨烯技术
首发时间:2017-05-12
摘要:湿法转移是使用最广泛的一种石墨烯转移方法,其在溶液进行。但是在一般的石墨烯的湿法转移方法中,不可避免地需要利用有机聚合物作为石墨烯的支撑保护层,否则石墨烯在腐蚀液中将分裂而破碎。而有机聚合物通常无法完全从石墨烯表面去除,因此残留的有机胶对石墨烯载流子浓度、接触电阻等方面都会产生影响。本文使用湿法免胶转移,利用铜箔本身作为保护层,将石墨烯更为直接地转移到硅衬底上,得到了表面高清洁度、较少有机物和颗粒污染的石墨烯。
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Resist-Free Wet Transfer of Graphene
Abstract:Graphene wet transfer is the most widely used method, which is carried out in solution. However, in the conventional process of wet transfer of graphene, organic polymer is inevitably used as the supporting protection for graphene layer, or graphene would be torn apart in the etchant. Usually, the organic polymer can not be totally removed on graphene surface and the polymer residue influences the carrier density, contact resistance etc. in graphene. In this paper, a wet resist-free transfer method is developed, in which copper foil itself is used as the supporting layer to directly transfer graphene on a Si substrate, and graphene with ultraclean surface, less organic polymer and particle pollution is finally obtained.
Keywords: graphene transfer resist-free
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