激光测量技术在超精密加工领域应用现状
首发时间:2017-08-25
摘要:激光测量技术以其易产生、易操控、高功率、高测量精度及激光波长覆盖几乎红外到 极紫外波段,脉冲宽度甚至能减小到几个光周期的固有性能,在超精密加工领域应用广泛。首先,介绍了常用一维激光测量、多维激光测量原理及其系统结构;其次,详细回顾了五代激光测量技术发展历程及我国激光测量技术发展历程;再次,阐述了飞秒激光测量、激光外差干涉测量、激光光栅检测、激光振动测量等现代常用激光测量技术的应用现状;最后,预测了激光测量技术的发展趋势并指出其不足。
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Laser measurement technology application status in the field of ultra-precision machining
Abstract:laser measurement technology widely used in the field of ultra-precision machining with its easy to produce, easy to control, high power, high measurement precision and almost extreme ultraviolet to infrared laser wavelength coverage, pulse width and even can reduce to a few light cycle inherent performance. Firstly, commonly used one dimensional laser measurement, multidimensional laser measuring principle and system structure were introduced. Secondly, the five generation of laser measurement technology development and laser measurement technology development in China were reviewed. Thirdly, present commonly used Laser measurement technology application status was elaborated, including femtosecond laser measurement, laser heterodyne interferometry, laser grating detection, laser vibration measurement and other laser measurement. Finally, forecasts the development trend of laser measurement technology and points out its disadvantages.
Keywords: laser measurement technology ultra-precision processing application status
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No.4740015120911215****
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