SPR Phase Detection for Measuring the Thickness of Bimetallic Layers' Film
首发时间:2018-01-19
Abstract:In this paper, the phase detection method is demonstrated to determine the films thicknesses of bimetallic layers by Surface Plasmas Resonance (SPR) prism coupler. It was proposed and developed by matching the experimental results to the theoretical curves of the phase difference with different angles of incidence. Theoretical analysis and experimental results indicate that the method proposed is stable and reliable, and feasible to be used to determine the film thickness of bimetallic layers directly with nanometer order resolution.
keywords: Phase measurement Metal optics Thin films Multilayers Surface plasmons
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双层金属薄膜厚度的SPR相位法测量
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