台柱型底座对微盘谐振器回音壁模式影响分析
首发时间:2018-01-12
摘要:本文分析台柱型底座倾角和尺寸对微盘谐振器中回音壁模式的影响。首先,确立了计算模型的结构参数。然后,用三维有限时域差分法计算氮化硅微盘底座倾角、微盘底座顶部半径和底座高度对回音壁模式特性的影响。仿真结果表明:台柱倾角对模式谐振波长没有影响,仅在倾角大于60度时会降低模式Q值;底座顶部半径较大或者底座高度较小时,引起模式谐振波长变化和Q值降低。在制备微盘谐振器时,应保证台柱形底座的倾角小,底座顶部半径小,底座高度足够高。
关键词: 微盘谐振器 回音壁模式 台柱形底座 谐振波长 Q值
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Analysis on effect of truncated cone pedestal on whispering gallery modes of microdisk
Abstract:In this paper, the impacts of the angle and the size of the truncated-cone pedestal on the characteristics of whispering gallery modes in microdisk resonators are analyzed. First, the structure and parameters of the calculation model are established. Then, the three-dimensional finite difference time domain method is used to calculate the impacts of the angel, the top radius and the height of the pedestal of a silicon nitride microdisk on the characteristics of whispering gallery modes. The simulation results show that the angle of the truncated-cone has no effect on the resonant wavelength of modes, and it will reduce the Q value of the modes only in the situation when the angle is greater than 60 degrees. When the top radius of pedestal is pretty large or its height is much small, the change of the resonant wavelength and the decrease of the Q value will be caused. In the fabrication of microdisk resonator, it should be ensured that the truncated-cone angle is small, the top radius of the pedestal is small, and its height is high enough.
Keywords: Microdisk Resonator Whispering-gallery Mode Truncated-Cone Pedestal Resonant Wavelength Q Value
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台柱型底座对微盘谐振器回音壁模式影响分析
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