Performance improvement of ZnO based MSM UV photodetectors by Au nanoparticles
首发时间:2018-06-01
Abstract:Localized surface plasmon resonance (LSPR) improved performance of ZnO based metal-semiconductor-metal (MSM) UV photodetectors is demonstrated by Au nanoparticles (Au NPs). The photocurrent has an obvious enhancement compared to the ZnO based MSM UV photodetectors without Au nanoparticles. The absorption spectrum of ZnO film with Au NPs has a LSPR peak at green light range, which is the explanation of the enhancement for the photocurrent. The results provide a way to enhance the photoelectric performance of ZnO based MSM UV photodetectors.
keywords: Applied Physics Localized surface plasmon resonance Au nanoparticles ZnO based MSM UV photodetector photocurrent
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Au纳米粒子对ZnO基MSM型紫外探测器性能影响的研究
摘要:本文主要采用射频磁控溅射的方法在蓝宝石衬底上先后沉积上Au薄膜(退火后转变成Au纳米粒子)、ZnO薄膜、Au插指电极,成功制备了掺有Au纳米粒子的ZnO基MSM型紫外探测器。通过X射线衍射、紫外可见光光度仪、吉时利2400表、扫描电镜等仪器测试分析了Au纳米粒子对ZnO薄膜晶体结构、光学和电学性能的影响。实验表明Au纳米粒子的掺入,引起了局部表面等离子体共振,有效的提高了ZnO基MSM型紫外探测器的性能。证明,局部表面等离子体共振效应在探测器中有很好的应用前景。
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