Design of transparent conducting aluminum film based on magnetic resonance

• 1、Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education of China,College of Optoelectronic Engineering, Chongqing University, Chongqing 400044

Abstract：In this paper, a continuous transparent conducting metal (TCM) structure induced by magnetic resonance is proposed. The structure consists of a top aluminum nanograting, an aluminum oxide layer and a target aluminum film. By exciting the magnetic resonance, the incident light wave can pass through a continuous aluminum film. The simulation results show that TCM can improve the transmittance of the aluminum film by 7.5 times at the near-infrared frequency, and it is insensitive to the change of the incident angle. Moreover, the transmission spectrum of the TCM can be adjusted by adjusting the structural parameters. The TCM structure was further fabricated using e-beam lithography and magnetron sputtering to vaerify the simulation results. Such TCM structure is easy to fabricated, which does not require any perforations on the target aluminum film, so that the full electric and mechanical properties of the aluminum film can be well preserved. The designed TCM can be widely used in photovoltaic cells, touch screens and other devices requiring transparent electrodes.

Keywords： optics transparent conducting metals magnetic resonance aluminum