Research on Ultraviolet Waveguide Device Based on Magnesium Fluoride-Alumina

• 1、State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876

Abstract：Photon integration, with its characteristics of enable optical systems miniaturization and integration, has shown a wide and excellent application prospect in the fields of information processing and sensing technology. In recent years, high-performance integrated optical waveguide devices in the ultraviolet band have attracted widespread research attention because of the expectation that they may bring revolutionary development to the miniaturization of biochemical detection technology and instruments. Optical waveguides are the foundation and core of photon integration. This study first aimed at achieving optical waveguides with low transmission loss and high integration in the ultraviolet spectral region. Through analysis of materials, magnesium fluoride (including magnesium fluoride) Layer) -alumina (core layer) material system. According to the characteristics of this material system, the corresponding waveguide structure is designed by taking multiple (common) wavelengths in the ultraviolet spectrum as an example. Based on this (and further based on the waveguide structure), a micro-ring resonator filter is designed and its performance is analyzed. Through numerical simulation of the micro-ring spectral characteristics, a magnesium fluoride-alumina ultraviolet waveguide ring filter with a free spectral range of 1.8 nm, a 3 dB bandwidth of 0.11 nm, and a quality factor of 3500 at 390 nm was obtained. Magnesium fluoride-alumina material system is an optical waveguide material suitable for the ultraviolet band, and has great potential in the development of high-performance ultraviolet optical waveguide devices.

Keywords： optoelectronics Ultraviolet Magnesium Fluoride Alumina Microring resonator