Optimization of wafer start plan considering bottleneck equipment maintenance plan

• 1、Shanghai Huali Microelectronics Corporation, Shanghai 201203
• 2、School Of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai 200240
• 3、School Of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai, 200240

Abstract：The existing wafer start plan is mainly based on the static average utilization rate of the bottleneck group, through the way of Constant Work in Processto execute, which is often difficult to adapt to the situation of large fluctuations in demand and production line, resulting in unreasonable wafer start plan and deterioration of cycle time. Therefore, this paper constructs a linear programming model of production wafer start plan considering the bottleneck equipment maintenance plan for multiple products and multiple periods, and solves the optimal solution through ILOG CPLEX to make a reasonable wafer start arrangement. The influence of different degrees of attention to the target on the comprehensive index of the factory is analyzed by simulation. The results show that if enterprises blindly pursue cycle time optimization and continuously reduce work in process inventory when making planning decisions, default cost will surge, which will outweigh.Therefore, the interaction among multiple production targets should be taken into consideration when making wafer start planning.

Keywords： Bottleneck group Wafer start plan Work in process inventory Cycle time