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期刊论文
Displacement measurement in real time using the attenuated totalreflection technique
APPLIED PHSYICS LETTERS VOLUME 87, NUMBER 17，-0001，（）：
A simple displacement measurement based on the attenuated total reflection technique is proposedand experimentally demonstrated. By analyzing the fringe shift of the reflective pattern recorded on a CCD camera, a slight displacement, which corresponds to a change in the waveguide thickness, can be determined in real time with adequate accuracy. The measurement range of this method isabout 240um, and its accuracy can reach 0.05um.
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