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期刊论文
Research O13 Micro Machining Using AFM Diamond Tip
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bstract. In this paper, micro machining is performed using AFM diamond lip, which is similar to a gin abrasive particle, and a high precision stage. Using mechanical scratching, microstructures are maehined on the surface of single crystal copper. Based on the system, some experimenls are carried out: parameters such as velocity of machining, applied force and amount of feed, which will influence procass of micro machining, are analyzed. The diamond tip state's influence on micro machining is also studied. And using the optimum parameters and proper machinin technique, the microstructures are machined. This approach is a no,.el unconventional micro machining technology. It can be applied in some micro machining fields such as: MEMS micro deqces' fabrication, mask fabrication of ulithography, micro pars micro machining, and machining or dressing on the micro-parts fabricaled by other ways.
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