Based on the geometrical features of the AFM (Atomic Force Microscope) diamond tip as well as the interac-tion existed between the diamond tip and the machined material, a theoretical model egarding single asperity cutting is put lobar th The experiments are conducted on various materials including AI-althy, single ctystaI germanium and silicon with differnt normal loads and cutting speed. On the basis of the theoretical analysis verified with the experimental re-suits, a study of cuttthg process on llano-scale in tern of cutting force and various material removal mechanism is carded out