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期刊论文
In situ observations of optical emission spectra in the diamond deposition nvironment of arc discharge plasma chemical vapor deposition
AppL Phys. Lett. 57 (14), 1 October 1990，-0001，（）：
In order to investigate the growth mechanism of diamond thin films, the in situ optical emission spectra of direct current (dc) arc discharge plasma, including the spatial distributions and different CH4/H2 ratios, have been measured during the growth processes of diamond thin films prepared by the dc arc discharge plasma chemical vapor deposition method. The results show that there are a great number of atomic hydrogens in the arc discharge piasma. This is the key factor for the growth of diamond films with a high rate and high quality. In addition, the effects of the CH4/H2 ratio on the quality of diamond films are discussed in detail in this letter.
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