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陈光华

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期刊论文

Textured growth of cubic boron nitride film on nickel substrates

陈光华Zhizhong Song Fangqing Zhang Yongping Guo and Guanghua Chen

Appl. Phys. Lett. 65 (21), 21 November 1994,-0001,():

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摘要/描述

Textured cubic boron nitride (c-BN) films have been deposited on (220) oriented crystallized polycrystalline nickel substrate by a hot filament assisted rf plasma chemical vapor deposition method. X-ray diffraction shows that the films are (220) preferentially grown, the peak ratio of (220) to the main peak [i.e., the (111) peak] is about 5.2. The scanning electron microscopy images exhibit regular grain shapes. Most of the grains are rectangular, also indicating the (220) growth. The grain size is about 5mm. The well-matched Ni lattice with c-BN, the catalytic effect of Ni, and the appropriate rf bias are considered to be the key factors in the textured growth.

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