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期刊论文
Tribological Properties of Rare Earth Self-assembled Nanometer Film*
Journal of Wuhan University of Technology-Mater. Sci. Ed. 2004, 19, 25～26，-0001，（）：
Self-assembled film containing the rare earth (RE) elements was formed on a silicon dioxide substrate, in order to reduce the surface adhesion and the f riction force of micro electro-mechanical systems (MEMS). The film thickness was measured as 2nm. The tribological experiment result shows that the friction coefficient of SiO2 substrate reduces from 0.5 to 0.1 after the formation of RE self-assembled film on its surface. Besides, RE self-assembled film exhibits a high wear resistant ance.
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