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陈林森

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期刊论文

A new method of laser direct writing binary beam-shaping element

陈林森Chen Linsen* a Shao Jie a Wei Guojun a Xie Jianfeng a Shen Yan a

Proceedinqs of SPIE Vol. 5636 (2005) 159-164,-0001,():

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摘要/描述

In order to realize the fabrication of binary beam shaping element with complex phase structures, a new method of making the relief phase structures under the dot-by-dot exposure mode is presented by using laser direct writing (LDW) system with the square-spot. The size of the square spot obtained with the projection optical configuration is set to match with the minimum phase unit which lead to exposure mode can be easily controlled. The difFraction properties of the phase unit structures etched with single Gaussian spot and square spot are discussed. The binary beam-shaping elements with two-steps by square-spot exposure have been achieved to 31.0% +1 0rder difFraction efficiency. The experimental results are given.

版权说明:以下全部内容由陈林森上传于   2009年08月31日 13时00分46秒,版权归本人所有。

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