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Liquid phase epitaxial growth of 3C-SiC films deposited on Si
Z. Chen et al. Biamond and Related Materials 10 (2001) 1255-1258，-0001，（）：
In this paper, we present a novel method to grow 3C-SiC crystal in a liquid-phase epitaxy-like manner, but without any substantial substrate. The starting material to be used in this method is the 3C-SiC-thin film deposited on Si substrate in a gas-phase heteroepitaxial technology. The free 3C-SiC film which remained of the molten Si substrate epitaxially grows up from the Si solution saturated by SiC in a highly purified graphite crucible heated by an inductive heater. XRD, XPS and Raman spectroscopy were used to characterize the samples. The only one peak with full width at half maximum (FWHM) of 0.2 at 20 = 35.65
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