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期刊论文
Size effect on the mechanical properties of microfabricated polysilicon thin films
J. Mater. Res., Vol. 16, No.8, Aug 2001,-0001,():
A new microtensile test device using a magnetic-solenoid force actuator was developed to evaluate the mechanical properties of microfabricated polysilicon thin films that were 100-660mm long, 20-200mm wide, and 2.4-mm thick. It was found that the measured average value of Young's modulus, 164 GPa
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