您当前所在位置: 首页 > 学者

丁建宁

  • 19浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 232下载

  • 0评论

  • 引用

期刊论文

Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

丁建宁J.N. Ding * Y.G. Meng S.Z. Wen

Materials Science and Engineering B56(2001)000-000,-0001,():

URL:

摘要/描述

The validity of a novel, direct and convenient method for micromechanical property measurements by beam bending using a nanoindenter has been demonstrated. In the deflection of microbeams, the influence of the indenter tip pushing into the top of the microbeams and the curvature across its width must be considered. The elastic deflection of a polysilicon microcantilever beam will vary linearly with the force. Thus, Young's modulus of the beam determined from the slope of this linear relation is 156 Gpa 92.9-6.3%. The size effects of the manufactured component on Young's modulus and strength of polysilicon microcantilever beams were measured. This result shows that the rupture strengths of polysilicon beams show size effect on the effective volume and surface area of the specimens. The rupture strength of each sample decreased with increasing the specimen effective volume and surface area, but increased with increasing the surface-to-volume ratio. The defect that initiates fracture is often on the surface of the specimen. In such cases the size effect can be traced back to a surface-to-volume ratio as the governing parameter.

【免责声明】以下全部内容由[丁建宁]上传于[2005年03月29日 17时37分26秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

我要评论

全部评论 0

本学者其他成果

    同领域成果