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期刊论文

Theoretical study of the sticking of a membrane strip in MEMS under the Casimir effect

丁建宁Jian-Ning Ding Shi-ZhuWen and Yong-Gang Meng

J. Micromech. Microeng. 11(2001)1-7,-0001,():

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摘要/描述

Mechanical stability and sticking are troublesome problems in microfabrication and operation processes when the separations of components in microelectromechanical systems are in the sub-micrometre regime. Some hitherto neglected mechanical effects, including the quantum mechanical effect, should be taken into account for solving the problems. The magnitude of the Casimir force is significant when the membranes work in vacuum without the effect of capillary forces. In this paper, an analysis is presented of the influence of the Casimir effect with surface roughness, conductivity and temperature corrected on the deformation of a membrane strip structure. With nothing other than the Casimir force loading the strip, a stable static equilibrium state and an unstable static equilibrium state exist, depending on the value of a dimensionless constant K. The membrane strip will collapse if the value of K is larger than the critical value of KC. The critical value of KC varies with the value of wo. This provides a way to check if a system with given dimensions and material properties will be in a stable equilibrium. This also provides a way of designing a membrane strip with high resistance to collapse.

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