您当前所在位置: 首页 > 学者

葛立峰

  • 22浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 99下载

  • 0评论

  • 引用

期刊论文

A Design of High-Sensitivity Micromachined Capacitive Ultrasonic Mass Resonators

葛立峰Li-Feng Ge

2008 IEEE International Ultrasonics Symposium Proceedings,-0001,():

URL:

摘要/描述

The TDK model originally developed for capacitive micromachined ultrasonic transducers (CMUT) is applied to the modeling and design of capacitive ultrasonic mass resonators (CUMR). The diaphragm of CUMRs is treated as a laminated plate in tension and supported by elastic foundation, and then its fundamental frequency can be expressed in terms of the stiffness of the diaphragm, tension in it, the electrostatic negative stiffness caused by bias voltage, the frequency parameter of the vibration of diaphragm, and area density of diaphragm. Furthermore, the mass sensitivity of CUMRs, which is intrinsically nonlinear, is derived and its first order approximation and the reference sensitivity are also defined. The design of CUMRs then can be computationally performed for different geometric dimensions of the device and the physical parameters of material used. Finally, a design of CUMRs is given based on the TDK model. Its fundamental frequency is 10.08MHz at bias voltage of 30V; the resonance frequency decreases as bias is increased and is down to 9.86MHz at 300V. The reference mass sensitivity is -1312cm2/g,so 1 Hz resonance frequency shift corresponds to an added mass of 76 pg/cm2. Comparing with piezoelectric ultrasonic mass resonators (PUMR), CUMRs can be an attractive choice for chemical and biological detections.

【免责声明】以下全部内容由[葛立峰]上传于[2009年03月10日 20时05分15秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

我要评论

全部评论 0

本学者其他成果

    同领域成果