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期刊论文
Aging effect of Co/C soft x-ray multilayer mirrors
J. Appl. Phys. 81 (1), 1 January 1997,-0001,():
The effect of aging on Co/C multilayer x-ray mirrors is presented. One significant result is the enhancement of the reflectivity at grazing incidence with time for the Co/C multilayers with C-on-top stored in air or argon and Co-on-top stored in argon. This can be interpreted in terms of a Co-C phase-separation at Co-C interfaces due to the positive enthalpy of Co-C mixing. Results also show that oxidation of the surface of Co-on-top Co/C multilayers plays an important role in the decrease of reflectivity. The oxidation can be prevented by storing the multilayers in an oxygen-free atmosphere or by depositing amorphous carbon as the top layer. The reflectivity of tarnished multilayers can be restored by removing the oxides by wet chemical methods.
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