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期刊论文
Analysis of the "dilemma effecta" in fifth-order deflection aberration
Nuclear Instruments and Methods in Physics Research A 427(1999)404-407,-0001,():
In this paper, the coma of the fifth-order aberration at a large deflection angle has been analyzed by using multipole field theory. The dilemma effect exists in the comas of fifth-order aberration. The dilemma effect, whose value D3 is constant and independent of the 10-pole field, is the linear combination of coma aberrations. The coma of the fifth-order aberration is corrected by adjusting the 10-pole field distribution when Dr is zero or small. The factors that influence the dilemma effect have been calculated and analyzed.
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