您当前所在位置: 首页 > 学者

刘兴钊

  • 34浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 78下载

  • 0评论

  • 引用

期刊论文

The preparation of double-sided YBCO thin films by simultaneous sputtering from single target

刘兴钊X.Z. Liu* B.W. Tao A. Luo S.M. He Y.R. Li

Thin Solid Films 396(2001)225-228,-0001,():

URL:

摘要/描述

The preparation of 1-inch double-sided YBCO thin films by simultaneous sputtering from a single target is reported. By rotating the substrate around the rod of the substrate holder and the normal of the substrate, YBCO thin films were simultaneously deposited on both sides of 1-inch (100)LaAlO3 substrate from a single inverted cylindrical sputter gun. The TC0 values of the YBCO thin films on both sides of the wafer were 90.3 and 90.4K, respectively. The transition width was 0.8K. The microwave surface resistance, Rs (77K, 10GHz), of the YBCO thin films on both sides of the wafer were 330 and 400mV, respectively. The uniformity of Rs values over the whole 1-inch wafer is good and the properties of YBCO thin films were found to be very similar on both sides of the wafer.

【免责声明】以下全部内容由[刘兴钊]上传于[2009年05月18日 15时44分26秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

我要评论

全部评论 0

本学者其他成果

    同领域成果