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刘治国
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期刊论文
Preparation of piezoelectric-coefficient modulated multilayer film ZnO/Al2O3 and its ultrahigh frequency resonance
Appl. Phys. Lett. 71 (4), 28 July 1997，-0001，（）：
Multilayer films composed of piezoelectrically active ZnO and inactive Al2O3 layers were prepared on silicon by a pulsed laser deposition technique. The ZnO layers were completely (001) Textured to generate a single piezoelectric coefficient d33 perpendicular to the substrate surface and the Al2O3 layers were amorphous at 375℃. The interfacial sharpness and the film orientation were analyzed by low and high angle x-ray diffraction u-2u scanning. High frequency resonance of 10.6GHz was measured and higher values up to 100 GHz are expected in the multilayer films with periods 320nm or smaller.
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