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刘治国

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期刊论文

Enhanced fatigue and retention properties of Pb(Ta0.05Zr0.48Ti0.47

刘治国J. Yina) T. Zhu Z. G. Liu and T. Yu

Appl. Phys. Lett., Vol. 75, No.23, 6 December 1999,-0001,():

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摘要/描述

Ferroelectric perovskite Pb(Ta0.05Zr0.48Ti0.47)O3 thin-film capacitors having LaxSr12xCoO3 bottom and top electrodes have been prepared on Pt/TiO2 /SiO2 /Si(001) substrates by pulsed-laser deposition. It is found that La0.25Sr0.75CoO3 bottom electrodes with cubic structure strongly promote the formation of (001) texture of PTZT films and improve the fatigue and retention properties of the capacitors. The polarization of the La0.25Sr0.75CoO3 /Pb(Ta0.05Zr0.48Ti0.47)O3 /La0.25Sr0.75CoO3 capacitors with a Pb(Ta0.05Zr0.48Ti0.47)O3 thickness of 400nm were subjected to no degradation after 131010 switching cycles at an applied voltage 5 V with a frequency of 1MHz. The capacitor retains more than 92.6% of its polarization after a retention time up to 105s. The possible microstructural background responsible for the excellent fatigue and retention properties was discussed.

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